Development of clamped-clamped beam type piezoelectric sensor for vacuum pressure measurement
碩士 === 國立中興大學 === 機械工程學系所 === 100 === In this thesis, a clamped-clamped beam type piezoelectric vacuum pressure sensor was developed. The piezoelectric beam fixed at both ends consists of a PZT layer perfectly bonded to the copper substrate. The dimensions of the PZT layers and copper substrate ar...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/45619720375140636940 |