Improved utilization and reduced usage of photoresist in the TFT-LCD photo lithography process

碩士 === 國立中興大學 === 機械工程學系所 === 100 === Recently, the product profitability of domestic thin film transistor liquid crystal display (TFT-LCD) companies decline, resulting in global competition and excess supply. To improve the profit and competitiveness, development of new technology and control of pr...

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Bibliographic Details
Main Authors: Ding-Ruey Guo, 郭丁瑞
Other Authors: 吳嘉哲
Format: Others
Language:zh-TW
Published: 2012
Online Access:http://ndltd.ncl.edu.tw/handle/98890714489160753683