Study on the temperature-related high pin count probe card thermal movement and probe-mark

• Main Authors: Wen-Hua Chang, 張文華
• Other Authors: Zingway Pei
• Format: Others
• Language: zh-TW
• Published: 2012
• Online Access: http://ndltd.ncl.edu.tw/handle/49327128739942208531

碩士 === 國立中興大學 === 光電工程研究所 === 100 === Probe card using for front-end wafer testing that getting probe mark by probe tip contact with bonding pad and also getting property and yield of circuit in high or low temperature environment. Since the progress of wafer process to make pad size getting smaller and more DUT quantity on probe card, it’s caused that difficult to control the position and size of probe mark. This purpose of research is to improve the probe mark issue that impact the stability of testing yield and reliability of packaging, even shorten the life of probe tip. This research consist of two parts, the first part is monitor the thermal movement curve of probe card under temperature controlled on prober to know when the needle height is stable, the second part is monitor probe mark variation by change the related parameter, for example, SET UP time, prober head plate planarity, needle alignment pins selection, 3D probing function. This achievement is getting the optimal setting to handle the probe mark problem and also gaining maximum capacity in the production line, relatively speaking, it’s also reduce the waste of manpower.