Epitaxial Growth of TiN Thin Film on Si Substrate by DC Magnetron Sputtering
碩士 === 明志科技大學 === 材料工程研究所 === 100 === In this study, epitaxial growth of TiN film on Si(100) and Si(111) substrates by DC magnetron sputtering, we controlled the substrate temperature, sputtering power and holder height in the same film thickness to research the influence of e...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/39026659136320306064 |