Study on the Processing and properties of TiAlBN coatings by Unbalanced Magnetron Sputtering
碩士 === 明道大學 === 材料科學與工程學系碩士班 === 100 === This thesis is to study the process and properties of the TiAlBN multilayer by using the unbalanced magnetron sputtering system. The content of this study is focused on the microstructure, mechanical properties and its potential application. Two different spu...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/89280704228611747573 |