High efficiency double – junction (a-Si/a-SiGe) thin film solar cells prepared by high frequency plasma enhanced chemical vapor deposition
碩士 === 明道大學 === 材料科學與工程學系碩士班 === 100 === Abstract In this study, a-Si/a-SiGe tandem solar cells have been fabricated by 27.1 MHz very high frequency plasma enhanced chemical vapor deposition. The process parameters are optimized for a-SiGe thin film solar cells. The thickness and gas flow ratio of i...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/38275583310500798553 |