The Study of Laser Direct-write Patterning Method for ITO Thin Film
碩士 === 高苑科技大學 === 電子工程研究所 === 100 === In this research, the laser direct-write patterning method is applied to the micromachining of ITO thin films on glass substrate. It is possible to complete the patterning process without damaging the substrate. The purpose of this study is to identify the prope...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/ya9jq6 |