Study on The Properties of (100) Oriented ZnO Piezoelectric Thin Film and Double Layer Bulk Acoustic Wave Resonator
碩士 === 國立高雄應用科技大學 === 電子工程系 === 100 === In this study, we deposited (100)-oriented ZnO and (100)-oriented AlN film by reactive RF magnetron sputtering method, also apply two films to fabricate thin film bulk acoustic resonator (FBAR). The FBAR structure was the metal electrode / ZnO piezoelectric la...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
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| Online Access: | http://ndltd.ncl.edu.tw/handle/69318351064928783154 |