| Summary: | 碩士 === 國立高雄應用科技大學 === 工業工程與管理系 === 100 === This article found in wafer etching process often appear complex and multiple reflow phenomenon, Wide range of products caused by the probability and time data in the process prone to ambiguity, and long-standing delays in improving this choke point,hoping to use the vague theory network assessment to address this issue, using experts to establish Vague function description vague network assessment of work parameters, and use the GERT gradually op law to conduct analysis, through the semiconductor etching process in machining process to do analysis. Compared with the traditional probability methods may be suitable for application in different cases. Fuzzy theory in handling uncertainty on the issue of significant achievements, and then vague collection of more fuzzy sets concept to promote, today the development and application made to the many achievements and recognition. Therefore, this study is the use of the Fab etching process in the concept of ambiguous Map GERT analysis to solve the problem, improve overall performance. The main purpose of this study include:
1. Continuation of the network diagram the structure of the Evaluation and Review Technique, through using the Vague function to compute the estimated operating time and the probability of the semiconductor etching District, and constructed in line with the ambiguity of human thinking Vague GERT calculation procedures, so that managers can have full access to many messages.
2. Vague theory and GERT fewer people to do this discussion in the domestic scholars, this study will be combined the two, and then import the information system to simplify the calculation procedure can cause various scholars combination morecomments, to develop a better model, and therefore are widely used in this study.
3. For today Crystal round factory etched area of production process for pursuant to, because Crystal round itself has can repair of property, etched area processing system range in the often produced circuit of job program, hope using network figure assessment operation in the can solution complex return sexual of function to for Crystal round factory etched area made simplified of role, and form vague theory in all extension of job data, makes let decision makers can more effective of made assessment, turn improve Crystal round factory overall of performance.
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