Effects Of Annealing Temperature On Structural And Nanomechanical Characteristics Of Ga-Doped ZnO Thin Films
博士 === 義守大學 === 材料科學與工程學系 === 100 === In this study, the effects of post-annealing（PA）and rapid thermal annealing（RTA）on the nano-structure, the surface morphology and nano-mechanical properties of ZnO thin films doped with a nominal concentration of 3 at.% Ga（ZnO:Ga）are investigated using X-ray dif...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/63217503613452732992 |