Epitaxial Growth Of Non-polar Sb-doped ZnO Thin Films On R-plane Sapphire Substrates
碩士 === 義守大學 === 材料科學與工程學系 === 100 === This thesis presents the investigation on the epitaxial growth of non-polar (11-20) plane ZnO and Sb-doped ZnO on r-plane sapphire substrates by radio-frequency magnetron sputtering system. The influence of dopant concentration, deposition temperature, process p...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/87253149909485355693 |