Characteristic Studies Of AZO Films By Ion Beam Co-Sputtering With Zn And Al Targets
博士 === 輔仁大學 === 應用科學與工程研究所博士班 === 100 === The properties of AZO films fabricated at room temperature by ion beam co-sputtering process with various aluminum concentrations and oxygen partial pressures were observed, respectively. The investigations of structure, optical property and conductivity of...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/84048145501630234106 |