Hydrogenated microcrystalline silicon thin film fabricated by ion-assisted deposition of RF magnetron sputtering
碩士 === 輔仁大學 === 物理學系 === 100 === Silicon thin film of solar cell is usually fabricated by plasma-enhance chemical vapor deposition (PECVD). The PECVD process is a high facility cost. And, the toxic gases, such as silane (SiH4), must be used in the fabrication process. The silicon film is also able...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/71378771513361330976 |