Fracture Toughness Test of Thin Films in Air by Mixed Mode Double Cantilever Beams
碩士 === 逢甲大學 === 機械工程學所 === 100 === Most materials utilized in micro-electro-mechanical devices are classified as brittle ceramic materials. The strength of a brittle material is related to the distribution of defects, which randomly changes. Thin film multilayers are commonly adopted in advanced mic...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/70479472231422052528 |