Studies on Characteristic of Piezoelectric Actuated Micropump with Check Valves
碩士 === 大葉大學 === 機械與自動化工程學系 === 100 === In this paper the design of the micropump has the characteristics of two outlet port and two inlet port, this design makes the liquid flow rate improved largely. Micropump using piezoelectric materials as actuator, stainless steel etched chamber layer, and the...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2011
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Online Access: | http://ndltd.ncl.edu.tw/handle/55070825275341105126 |