Spike Data Removal Algorithm for White-Light Interferometer
碩士 === 中原大學 === 機械工程研究所 === 100 === Generally, there are two operating methods when using white light interferometry (WLI) to measure an object. First, phase shift interferometry (PSI) is applicable to observe small scale of change on the surface of sample. Second, vertical scanning interferometry (...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/85683861237428948876 |