Investigation of film thickness of photoresist coating in lithography
碩士 === 中原大學 === 機械工程研究所 === 100 === Under the highly competitive of TFT-LCD panel, the most common issue for engineers are to increase manufacturing efficiency, decrease the production costs, and invent new products and technology. The purpose of this study is to discuss how to use the cheaper photo...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/14218377622211227633 |