AlN Film with Pentacene Layer Used in Acidic Solution Sensing
碩士 === 中原大學 === 電子工程研究所 === 100 === In this thesis, we deposit Pentacene organic thin film by thermal evaporation system, and deposit AlN dielectric layer by DC sputter. We manufacture acid solution ion sensor device by top gate structure. For covering Pentacene thin film, we deposit AlN dielectric...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/01245509893911741107 |