Investigation of semiconductor process for improving component quality
碩士 === 中華科技大學 === 機電光工程研究所在職專班 === 100 === The chip quality is the important topic of semiconductor industry along with the chip size reduction, and the oxide breakdown and the electro-migration phenomenon are both the major issue of IC quality. Oxidation process is used in semiconductor industry. I...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/48458116905469526792 |