Improved Lithography Resolution by Varying I-LINE Optical Lithography Numerical Aperture
碩士 === 長庚大學 === 電子工程學系 === 100 === DRAM (Dynamic Random-Access Memory) is required for larger and larger capacity memory chips with the progress of technology. The IC (Integrated Circuit) manufacturers certainly want to make a largest memory capacity with small wafer size. All they have to do i...
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| Format: | Others |
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2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/41063964861734146495 |