Study on the Characteristics of Using Selectively Wet-etching Process in InGaAs/GaAs/AlGaAs Quantum-well Infrared Photodetector

碩士 === 國防大學理工學院 === 光電工程碩士班 === 100 === In this thesis, the study is addressed in the use of selectively wet-etching directly to promote the thermal imaging performance of quantum well infrared photodetector (QWIP) after roughly mechanical etching process on backside GaAs wafer. For the treatment of...

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Bibliographic Details
Main Authors: Lu,Yi-Lin, 盧逸麟
Other Authors: Chen,Tzu-Chtang
Format: Others
Language:zh-TW
Published: 2012
Online Access:http://ndltd.ncl.edu.tw/handle/b8mwaw