The study on nanostructured Cr-B-N nanocomposite thin films prepared by thepulsed DC magnetron sputtering system
碩士 === 東南科技大學 === 機電整合研究所 === 99 === Eleven nanostructured Cr-B-N thin films coatings were deposited by a bipolar asymmetric reactive pulsed DC magnetron sputtering system. Seven Cr-B-N thin films containing different B contents were obtained based on the distance difference between the Si substrate...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/94579510325337051974 |