Studies of bias enhanced growth of nanocrystalline diamond films by microwave plasma chemical vapor deposition
碩士 === 淡江大學 === 物理學系碩士班 === 99 === Due to the mismatch in the lattice parameters of diamond and silicon, prenucleation process is necessary to grow diamond on the Si-substrate. The conventional way of nucleating the Si-substrates, the ultrasonication in diamond and Ti-powder solution, requires long...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/35996490373964767177 |