Study of the Optical Properties Based on the Glancing Angle Deposition Silicon Dioxide Thin Films

Study of the Optical Properties Based on the Glancing Angle Deposition Silicon Dioxide Thin Films

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碩士 === 國立臺北科技大學 === 光電與能源產業研發碩士專班 === 99 === This study is use Radio-Frequency magnetron sputtering system to use as different angle oblique deposition SiO2 (Silicon Dioxide) thin films on Si (Silicon) wafer, to study about the relationship between the deposition angle and the optical properties....

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Main Authors: Chin-ming Cho, 卓欽明
Other Authors: 陳隆建
Format: Others
Language:zh-TW
Published: 2011
Online Access:http://ndltd.ncl.edu.tw/handle/2et348
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spelling ndltd-TW-099TIT053990022019-05-15T20:42:29Z http://ndltd.ncl.edu.tw/handle/2et348 Study of the Optical Properties Based on the Glancing Angle Deposition Silicon Dioxide Thin Films 斜向沉積二氧化矽薄膜之光特性研究 Chin-ming Cho 卓欽明 碩士 國立臺北科技大學 光電與能源產業研發碩士專班 99 This study is use Radio-Frequency magnetron sputtering system to use as different angle oblique deposition SiO2 (Silicon Dioxide) thin films on Si (Silicon) wafer, to study about the relationship between the deposition angle and the optical properties. 陳隆建 2011 學位論文 ; thesis 39 zh-TW
collection NDLTD
language zh-TW
format Others
sources NDLTD
description 碩士 === 國立臺北科技大學 === 光電與能源產業研發碩士專班 === 99 === This study is use Radio-Frequency magnetron sputtering system to use as different angle oblique deposition SiO2 (Silicon Dioxide) thin films on Si (Silicon) wafer, to study about the relationship between the deposition angle and the optical properties.
author2 陳隆建
author_facet 陳隆建
Chin-ming Cho
卓欽明
author Chin-ming Cho
卓欽明
spellingShingle Chin-ming Cho
卓欽明
Study of the Optical Properties Based on the Glancing Angle Deposition Silicon Dioxide Thin Films
author_sort Chin-ming Cho
title Study of the Optical Properties Based on the Glancing Angle Deposition Silicon Dioxide Thin Films
title_short Study of the Optical Properties Based on the Glancing Angle Deposition Silicon Dioxide Thin Films
title_full Study of the Optical Properties Based on the Glancing Angle Deposition Silicon Dioxide Thin Films
title_fullStr Study of the Optical Properties Based on the Glancing Angle Deposition Silicon Dioxide Thin Films
title_full_unstemmed Study of the Optical Properties Based on the Glancing Angle Deposition Silicon Dioxide Thin Films
title_sort study of the optical properties based on the glancing angle deposition silicon dioxide thin films
publishDate 2011
url http://ndltd.ncl.edu.tw/handle/2et348
work_keys_str_mv AT chinmingcho studyoftheopticalpropertiesbasedontheglancingangledepositionsilicondioxidethinfilms
AT zhuōqīnmíng studyoftheopticalpropertiesbasedontheglancingangledepositionsilicondioxidethinfilms
AT chinmingcho xiéxiàngchénjīèryǎnghuàxìbáomózhīguāngtèxìngyánjiū
AT zhuōqīnmíng xiéxiàngchénjīèryǎnghuàxìbáomózhīguāngtèxìngyánjiū
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