Study of the Optical Properties Based on the Glancing Angle Deposition Silicon Dioxide Thin Films

碩士 === 國立臺北科技大學 === 光電與能源產業研發碩士專班 === 99 === This study is use Radio-Frequency magnetron sputtering system to use as different angle oblique deposition SiO2 (Silicon Dioxide) thin films on Si (Silicon) wafer, to study about the relationship between the deposition angle and the optical properties....

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Bibliographic Details
Main Authors: Chin-ming Cho, 卓欽明
Other Authors: 陳隆建
Format: Others
Language:zh-TW
Published: 2011
Online Access:http://ndltd.ncl.edu.tw/handle/2et348