Study of the Optical Properties Based on the Glancing Angle Deposition Silicon Dioxide Thin Films
碩士 === 國立臺北科技大學 === 光電與能源產業研發碩士專班 === 99 === This study is use Radio-Frequency magnetron sputtering system to use as different angle oblique deposition SiO2 (Silicon Dioxide) thin films on Si (Silicon) wafer, to study about the relationship between the deposition angle and the optical properties....
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2011
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Online Access: | http://ndltd.ncl.edu.tw/handle/2et348 |