The Appropriate Pressure Micro-Sensor Development of Electromagnetic Induction
碩士 === 國立虎尾科技大學 === 機械與機電工程研究所 === 99 === This study is to discuss the crucial problem of probe card. On the wafer-stage testing, in order to measure the resistance value, we need to use specific probe and have enough contact force to pierce the oxide layer on the tested strip. Then using the prescr...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/a4h84c |