Development of Laser Direct Writing Equipment of Nano Stage
碩士 === 國立虎尾科技大學 === 機械與機電工程研究所 === 99 === This research project in title of “Laser Direct Writing Processing Equipment for Periodic Nanostructure Pattern” integrated the technologies of the hybrid long-stroke precision nano-stage design, the multi-DOF heterodyne interferometer feedback control syste...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/46755r |