Characterization of Diamond-like Carbon Thin Film Grown by Chemical Vapor Deposition Technology

碩士 === 國立虎尾科技大學 === 光電與材料科技研究所 === 99 === DLC (Diamond Like Carbon) films is a kind of film that possesses high hardness, low friction, extremely good physics and chemical stability, insulating and heat-conduction is good, wear-resisting characteristic of dawdling. There is important application on...

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Bibliographic Details
Main Authors: Hao-Peng Yen, 顏昊朋
Other Authors: 陳文瑞
Format: Others
Language:zh-TW
Published: 2011
Online Access:http://ndltd.ncl.edu.tw/handle/6zqmp8