The measurement for 3D mircostructure of thin film by using Michelson Interference method
碩士 === 國立高雄大學 === 電機工程學系--先進電子構裝技術產業研發碩士專班 === 99 === As electro-optical devices become dominated, the optical thin-films are important elements in the fabrication of electro-optical industry. Except for the needs of high quality's optical thin-films, surface's examination of thin...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/31379950343554319444 |