Research on the Accurate Positioning of a Long Travel Air-Bearing Nano-Positioning Stage Using the Linear Motors

• Main Authors: Wen-Sheng Chien, 簡汶昇
• Other Authors: none
• Format: Others
• Language: zh-TW
• Published: 2011
• Online Access: http://ndltd.ncl.edu.tw/handle/n6w3h5

碩士 === 國立臺灣科技大學 === 機械工程系 === 99 === The objective of this research is to develop a PC-based closed-loop nano-positioning system using the dual-frame two-axis drive single mobile independent framework. The stage body was supported by an air bearing on a granite base to reduce the frictional force. The developed stage was driven by the PC-Based interface of ANCA 5DX CNC controller the ANCA 5DX Digital Servo drive, for the precision motion control of the linear motors. The laser scales were used as the feedback sensors so that the closed loop control of the developed system was possible. Based on the test results, the designed closed loop nano-positioning system was capable of precision positioning within the travel of 100 mm along X-axis and the travel of 50 mm along Y-axis. The Z-direction stage stability of the developed system was 20 nm, the maximum yaw error of the stage moving along X-axis was about 3.77 arc-seconds, and the maximum pitch error of the stage moving along Y-axis was about 1.04 arc-seconds, based on the test results. By utilizing the PC-Based interface of ANCA 5DX CNC controller based closed-loop of PID control system, the positioning capability of X-axis was about 2 nm, the positioning capability of Y-axis was about 5 nm. Performing the circular test with radius of 20 mm, the circular positioning test of deviation was 223 nm. Based on the tracing speed test results, the standard deviation along X-axis was 3 nm under tracing speed of 0.05 mm/min, whereas the standard deviation along Y-axis was 9 nm under tracing speed of 0.05 mm/min.