Research on the Accurate Positioning of a Long Travel Air-Bearing Nano-Positioning Stage Using the Linear Motors
碩士 === 國立臺灣科技大學 === 機械工程系 === 99 === The objective of this research is to develop a PC-based closed-loop nano-positioning system using the dual-frame two-axis drive single mobile independent framework. The stage body was supported by an air bearing on a granite base to reduce the frictional force. T...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/n6w3h5 |