Structural and Luminescent Properties of Sputter Deposited Silicon Oxynitride Films and Multi-layered Silicon Oxynitride/Silicon Stack
碩士 === 國立臺灣科技大學 === 材料科學與工程系 === 99 === Silicon oxynitride (SiOxNy) and multi-layered silicon oxynitride/silicon structures (SiON/Si) with different nitrogen and oxygen concentrations were fabricated by reactive magnetron sputtering deposition followed by thermal annealing in high vacuum environment...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/2r64g3 |