Theoretical Modeling and Experimental Verification of Linear Variable Filters
碩士 === 國立臺灣科技大學 === 自動化及控制研究所 === 99 === This research was divided into two parts. First part was the large mask design inside of Evaporation that has the potential to improve thickness uniformity of thin film and increase process yield for that. The other was the design of linear variable filters t...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2011
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Online Access: | http://ndltd.ncl.edu.tw/handle/ae7b89 |