Application of Grey Relational Analysis on Fault Diagnosis Assistance System: A Case Study of Chemical Dispensing System
碩士 === 國立臺灣科技大學 === 自動化及控制研究所 === 99 === Recently, the typical fault diagnosis of a semiconductor factory’s chemical dispensing system is that an engineer makes fault diagnosis according to alarm status and his own maintenance experience. However, it is difficult for training an experienced engineer...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/8sec82 |