Design and Fabrication of CMOS Differential Circuit for Micro-Displacement Sensing
碩士 === 國立臺灣大學 === 應用力學研究所 === 99 === Probing into design of the capacitance detecting circuit for the ring type gyroscope is the purpose of this thesis. Ring type gyroscope is a small structure made with MEMS process. The sensing signal of this gyroscope due to the gap changes while the angular ve...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/57601212693791334819 |