Development of a Micro Reconfigurable Ultra-Precision Interferometer
碩士 === 國立臺灣大學 === 機械工程學研究所 === 99 === Nowadays, in pace with the development of semiconductor, micro-electronic and biological industries, many micro/nano manufacturing, positioning and metrology depend on the technologies of ultra-precision sensor. However, to achieve large metrology range and high...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/80965283472008160450 |