Design and Control of a Precision Electromagnetic Positioner for Large Measurement-range Atomic Force Microscope
碩士 === 國立臺灣大學 === 電機工程學研究所 === 99 === Conventional atomic force microscope suffers from the limitation of small scanning scale, due to the short travelling range of piezoelectric actuation. In this thesis, a large measurement-range AFM scanning stage which combines both fine positioners respecti...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/27038411071207318373 |