Semiconductor Tool Petri Net Modeling for Sequence Optimization: Furnace and PVD Cluster Tool Cases
碩士 === 國立臺灣大學 === 電機工程學研究所 === 99 === In the construction of a semiconductor fab., the cost of equipment is above 70% of the total cost. Therefore the production equipment performance is directly reflexes in the invest reward in the industry. This paper is focus on "semiconductor fab.", us...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/70090963699924796280 |