High-Speed Algorithms for Scatterometry Diagnosis and GPU-based Optical Lithography Simulation
碩士 === 國立臺灣大學 === 電子工程學研究所 === 99 === To ensure the quality of the nano-imprint fabricated optical gratings, optical scatterometry (OS) is an efficient and effective mean to diagnose the actual fabricated geometry. To facilitate the diagnosis process, efficient pattern matching algorithms over a hug...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/61313048320264765595 |