Electrical Property of p and n-type SiNW and Frequency Tunable SiNW Resonator by External Bending Force
碩士 === 國立臺灣大學 === 電子工程學研究所 === 99 === Electric-field-directed growth of n-type and p-type silicon nanowires by vapor-liquid-solid (VLS) mechanism in a low pressure chemical vapor deposition (LPCVD) system is demonstrated. By depositing several isolate metal pads in the growth direction, the local-in...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/41303335920100652308 |