Preparation of Mesoporous Low-k Films from Crystalline Pure Silica Zeolite (PSZ) Nanocrystals and from Noncrystalline Silica Nanoparticles
博士 === 國立臺灣大學 === 化學工程學研究所 === 99 === In this research, mesoporous low dielectric constant (low-k) films were prepared from coating solutions composed of surfactant Tween 80 and nanoparticles of different crystallinity synthesized through hydrothermal processes. The propose is to prepare mesoporous...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/75519336259000930187 |