Residual Stress Analysis for Thin Films
碩士 === 國立臺灣海洋大學 === 機械與機電工程學系 === 99 === The thermal-induced residual stress in the polycrystalline thin films is investigated in this thesis. In addition to considering the difference in thermal expansion between thin film and substrate, the effect of the orientation of grains on the residual stres...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/60128756159952360285 |