Mechanism of Enhanced Reaction in Aluminum Induced Crystallization Process by Sputtering Al-1%Si Alloy
碩士 === 國立清華大學 === 工程與系統科學系 === 99 === Grow of thin-film polycrystalline Si (pc-Si) as a seed layer has been shown to be useful for further epitaxially thickening absorber layers for thin film solar cell. In order to effectively reduce the cost of seed layer, we propose in this thesis to deposit pc-S...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/77862009368195008268 |