Study of Crystalline High-K Materials Combined with Rare-Earth Oxide Interfacial Layer as the Gate Stack for MOS Devices

碩士 === 國立清華大學 === 工程與系統科學系 === 99

Bibliographic Details
Main Authors: Lyu, Rong-Jhe, 呂榮哲
Other Authors: Wu, Yung-Hsien
Format: Others
Language:zh-TW
Published: 2011
Online Access:http://ndltd.ncl.edu.tw/handle/50245733345260594510