Study of Crystalline High-K Materials Combined with Rare-Earth Oxide Interfacial Layer as the Gate Stack for MOS Devices
碩士 === 國立清華大學 === 工程與系統科學系 === 99
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2011
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Online Access: | http://ndltd.ncl.edu.tw/handle/50245733345260594510 |