Lifting, Welding, and Packaging of a Quality-Factor-Controllable Micromachined Inductor Using Magnetic Fields
博士 === 國立清華大學 === 動力機械工程學系 === 99 === In order to reduce inductor’s substrate loss, this study demonstrates a novel approach to lift the RF-MEMS inductor from the lossy substrate by static magnetic field to improve the quality factor of the inductor. The lift angle of the inductor, which tuned by a...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/10195492477164076978 |