Solution process synthesize metal oxide colloidal solution for semiconductor thinfilm

碩士 === 國立清華大學 === 化學工程學系 === 99 === In this study, In2O3, Ga2O3 and ZnO pre-cursors were prepared in H2O solution as a cost effective solution for TFT device fabrication. The element ratios of the precipitants were ensured and monitored by solubility and pH value comparison with known pre-cursors. T...

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Bibliographic Details
Main Authors: Ou, Han-Szu, 歐漢司
Other Authors: Chou, Kan-Sen
Format: Others
Language:zh-TW
Published: 2011
Online Access:http://ndltd.ncl.edu.tw/handle/00192311528077777496