A novel SU-8 stamping and electrostatic pulling method for microlens array fabrication
博士 === 國立中山大學 === 機械與機電工程學系研究所 === 99 === This research reports a simple and novel method to fabricate microlens arrays by soft stamping the unexposed SU-8 photoresist. A SU-8 based stamp composed of micro-nozzle arrays with a reservoir structure on a glass substrate is first fabricated using a proc...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/32109064010400198839 |