Study of Liquid Sensor Using Dual-Mode ZnO Thin-Film Bulk Acoustic Resonator (TFBAR)
碩士 === 國立中山大學 === 電機工程學系研究所 === 99 === A novel liquid sensor is designed and fabricated by using thin film bulk acoustic resonator (TFBAR) devices with c-axis 23°-tilted ZnO films. To fabricate TFBAR devices, the off-axis RF magnetron sputtering method for the growth of piezoelectric ZnO thin films...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/50522120087495626466 |