Effect of silicon substrate treatment on the growth of DLC thin film

碩士 === 國立中山大學 === 電機工程學系研究所 === 99 === Diamond-like Carbon (DLC) film exhibits an extreme hardness, low friction coefficient, chemical stability, heat conductivity, and high resistance. Their properties lead to remarkable applications on industry. In the experiment, we use electrondeposition to depo...

Full description

Bibliographic Details
Main Authors: Che-min Li, 李哲旻
Other Authors: Herng-Yih Ueng
Format: Others
Language:zh-TW
Published: 2011
Online Access:http://ndltd.ncl.edu.tw/handle/94669689010122153164