The characteristic of ZnO thin film heterjunction deposited by RF sputtering
碩士 === 國立中山大學 === 光電工程學系研究所 === 99 === The electro-optical properties of the ZnO thin film are affected by the deposition parameters. In this study, we find the optimum growth parameters to grow high quality ZnO film. We change the RF power to adjust the surface roughness. The higher RF power will r...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/01291314864215184548 |